DRF-B80型蓝宝石晶体生长炉的研制

DRF-B80 Sapphire Crystal Growth Furnace

本文主要介绍采用冷心放肩微量提拉法技术生长高质量大尺寸蓝宝石晶体的新型设备,由于晶体生长是在高温、高真空、籽晶升降与旋转平稳、晶体测重精准、功率稳定的状态下进行生长。所以我们配备了具有高冷却性能的腔体部件;大抽速,低反油率的高真空系统;无抖动、无爬行籽晶轴(俗称:籽晶热交换器)升降及旋转系统;高精度、高分辨率测重系统;稳定可靠的电控系统及电源加热系统。实验结果表明:设备简化的设计模式,不仅提高了工人的操作速度,操作更加简单,节约了劳动时间,提高了设备的利用率。优良的测重系统在早期晶种生长的好坏,有这很大的关系;解决晶体是否粘埚也起着很大的作用。电控系统对加热电源的稳定控制是能否生长高质量大尺寸晶体关键之一。

This paper describes the new equipment,which can use the cold core to put the shoulder trace Czochralski method to growth of high-quality large-size sapphire crystal.Because of the crystal needs growth in high temperature,high vacuum,and the seed lift and rotate smooth,heavy precision crystal measured,steady state power supply environment,so we are equipped with vacuum chamber parts with a high cooling performance;High pumping speed,low anti-oil yield high vacuum system;Jitter-free,no crawling seed shaft（Commonly known as： Seed heat exchanger） lift and rotation system;High-precision,high-resolution weight sensing system;Stable and reliable electronic control systems and power heating systems to ensure the process of crystal growth.Experimental results show that： Simplify the system module design method not only improve the operating speed of the workers and simplified the operation steps,but also shorten the growth cycle and improved utilization of equipment.The excellent weight sensing system has a significant impact to the early stage of the seed growth;also play a significant role to solve the crystal whether to stick the crucible problem.The electronic control system for stability control of the heating power is one of the key factors to grow high quality large-size crystals.