摘要
采用基于透镜-反射镜式逆反射光路的干涉仪进行微位移测量时,被测位移会引起测量光束的波面变化。本文对这种波面变化和其对位移测量结果的影响进行了分析,推导出了波面变化引起的位移测量误差与透镜的焦距/有效孔径之比和位移的近似关系。对合理使用基于透镜-反射镜的逆反射方法,发挥其在干涉微位移测量中的优势,避免其不足,具有指导作用。
When a micro-displacement is measured using a laser interferometer based on lens-mirror retroreflection,the wavefront of measurement beam changes with the displacement.The wavefront change and its influence on the measurement result are analyzed.The approximate relationship between the measurement error caused by the wavefront change,the ratio of focal length to effective aperture of the lens and the displacement are derived.This work has reference value for using the lens-mirror retroreflection method properly in micro-displacement measurement to make full use of its strength and avoid its weakness.
出处
《计测技术》
2012年第5期5-7,17,共4页
Metrology & Measurement Technology
基金
航空科学基金资助项目(2009ZD44012)
关键词
微位移测量
干涉仪
波面变化
逆反射
micro-displacement measurement
interferometer
wavefront change
retroreflection
