软刻蚀——图形转移和微制造新工艺

Soft lithography—A new microfabrication and microstructure copying method

:“软刻蚀”是相对于微制造领域中占据主导地位的刻蚀而言的微图形转移和微制造的新方法 ,总的思路就是把用昂贵设备生成的微图形通过中间介质进行简便而又精确的复制 ,提高微制作的效率 ,包括微接触印刷 ,毛细微模塑 ,溶剂辅助的微模塑 ,转移微模塑 ,微模塑 ,近场光刻蚀等。这些方法工艺简单 ,对实验室条件要求不高 ,又能在曲面上进行操作 。

Soft lithography is, relative to the photolithography which is in dominate position, a newly developed technology on microstucture copying and microfabrication. The main idea is that the micro patterns, which are produced by very expensive equipments, should be simphy and precisely Copied through intermediates. They are microcontact printing, micro molding, microtransfer molding, micromolding in capillaries, solvent assisted micromolding and photolithography in the optical near field. It is easy to carry out in normal laboratory conditions, also to produce micro structures on curved surface and 3 dimension structures. It is used to make nano or micro structures on metal, polymer and ceramic.