摘要
介绍一种集成电路版图复杂图案的处理和扫描技术 ,提出在一个大场中 ,分割成若干小场的扫描实用算法 。
The processing and scanning technology of the complicated pattern of the LSI picture is introduced. A useful scanning algorithm is presented in which the large field is divided into many small fields. The small field positioning and high speed scanning are realized by the hardware. And the setting of various kinds of modes is completed by software for the high speed scanning.
出处
《微细加工技术》
2000年第2期24-27,7,共5页
Microfabrication Technology
关键词
矢量扫描
微机控制
版图图案
扫描技术
集成电路
algroithm processing
microfabrication
vector scanning
microcomputer control
