摘要
高精度、高稳定性、高降温速率的热场 ,是液相外延设备研制中的关键技术之一。介绍了热场的结构设计、炉温的控制及调试结果。
One of the key technologies in developing LPESystem is the vealization of the pricise thermal field with high precision, high stability and high decreasing rate of temperature. The constsruction design of thermal field, control of furnace temperature and it's adjustment results are described.
出处
《微细加工技术》
2000年第3期70-74,共5页
Microfabrication Technology
基金
国家"8 6 3"基金资助项目!(86 3 715 Z34 0 1)
关键词
热场
液相外延系统
Thermal field
Temperature decreasing rate
Temperature decreasing plateau
Serial Control
PID adjustment
