摘要
提出了一种采用压电陶瓷器件实现微位移系统的方法，可在１０μｍ内实现０．０１μｍ的微动分辨力。该方法已成功应用在惯性仪表零件小孔径的亚微米超精测量系统中，达到了满意的效果。
A new method for micro-displacement system by means piezoelectric part was presented in this pa- per and the resolution over 0. 01 μm of micro-displacement was obtained in the range longer than 10 μm. This method was well used in the ultra-precision diameter measuring system of small aperture.
出处
《压电与声光》
CSCD
北大核心
2000年第4期244-245,252,共3页
Piezoelectrics & Acoustooptics
关键词
微位移系统
电压器件
陶瓷器件
piezoelectric part
measurement
micro-displacement
control
