光束扫描检测法及二维快速激光扫描系统

A Method of Measuring Beam Scans Function

提出了一种检测光束扫描性能的方法 ,并用于光机扫描 ,测量几种频率下 ,指令函数为三角波和锯齿波时 ,M3检流计式振镜扫描器的扫描函数。并在这种检测方法的支持下 。

This article brought up a method of inspecting the property of the scanner,and applied the method to optic mechanic scanner,Scanning functions of M3 galvanometer scanner under the drive of triangle wave and saw tooth wave instruction functions of several frequencies were measured.Under the supporting of this method we established a two dimensional rapid scanning laser system.