电化学蚀刻加工工艺及装备研发

The development of electrochemical etching technology and equipment

为解决由难切削材料制成的薄壁长筒类零件表面加工难题而研制出一整套电化学蚀刻专用机床及工装系统。利用该机床对以钼单晶基体化学气相沉积钨涂层为材料的薄壁工件进行加工,并对其电化学蚀刻加工工艺参数进行优化选择。结果表明,电化学蚀刻专用机床可以高效地对薄壁长筒类零/部件进行自动化蚀刻加工,为由难切削材料制成的薄壁长筒类零件表面加工提供了一条崭新的途径。

To solve the machining problem of thin-walled long tubes parts which are made of hard-to-cut materials, the electro- chemical etching machine tool and technological equipment have been developed. The machining experiments of thin-walled long tubes parts which are made of CVD tungsten layer on single-crystal molybdenum ubstrate are carried out on the machining tools. The proper electrochemical etching parameters are selected according to the experiments. The result indicates that the thin-walled long tubes parts are processed effectively and automatically by the electrochemical etching machine tool which supplies a new manufacture method to the cylindrical surface of the thin-walled long tubes parts which are made of hard-to-cut materials.