摘要
薄膜热流传感器具有响应时间快,体积小等优势,可用于航空、航天等领域高速飞行器表面短时间的高温热流瞬态测量。热流传感器原理基于不同热障层薄膜下薄膜热电偶温度变化量的大小,通过离子束溅射镀膜工艺成功制备快速响应薄膜高温热流传感器。试验结果表明:该传感器热响应时间可达0.1s,温度可达900℃。
Thin film heat flux sensor with advantages of fast response time,small size and adapting for high temperature,can be used for aviation and aerospace high-speed aircraft measurements.Measurement theory of heat flux sensor is based on the differences of thin-film thermopile temperature between thin-film thermal barrier layers,high-temperature thin-film heat flux sensors is made successfully through the technology of ion-beam sputtering deposition of film.The results showed that response time of the heat flux sensor is 0.1s,the work temperature can reach 900℃.
出处
《微处理机》
2012年第5期1-3,共3页
Microprocessors
关键词
薄膜
热流检测
离子束溅射
高温
快速响应
Thin film
heat flux sensor
ion-beam sputtering
high-temperature
fast response
