CVD金刚石膜的机械抛光加工研究

STUDY ON MECHANICAL POLISHING PROCESSES OF CHEMICALLY VAPOR DEPOSITED DIAMOND FILMS

在简要综述 CVD金刚石膜光整加工方法的基础上 ,在自动抛磨机上对 CVD金刚石厚膜进行了初步的机械抛光工艺研究 ,借助扫描电子显微镜 (SEM)对抛光前后及抛光过程中 CVD金刚石膜的表面形貌变化进行了观察 ,初步讨论了 CVD金刚石的去除过程。

On the basis of briefly reviewing the polishing process techniques of chemically vapor deposited diamond films,an primary investigation on mechanical polishing processes for chemically vapor deposited diamond thick films was carried out using automatic polishing, as well as during polishing process, were observed by means of scanning electron microscope. The removal steps of chemically vapor deposited diamond films was preliminary discussed.