电磁驱动式微拉伸装置的研究(英文)

Magnet-coil Force Actuator for Microtensile Test De-vice

为了能精确地测试和评定微构件的力学特性 ,需研制微拉伸装置。本文对电磁 -线圈力驱动器的结构和参数进行了优化设计 ,并将其应用于微拉伸装置。结果表明 ,由于磁场梯度与线圈的激励电流成线性关系 ,因而能进行精确的控制。在设计微拉伸装置时 ,样品的一端附在由叶片弹簧悬挂的可移动拉杆上 ,另一端固定。通过线圈激励产生的磁场对拉杆上的磁铁作用 ,施加拉力。利用光纤传感器测量位移。最后 ,采用内径 a1=0 .0 0 8m,匝数 n= 12 80 0的线圈 ,可得到作用于磁铁的力与电流的关系为 ΔF/ΔI=0 .50 3± 0 .0 1m N/m A。

In order to testand evaluate the mechanical properties of the used films or microstructures accuratly, the optimum configuration and geometry for a magnet- solenoid force actuator have been presented,enabling its application to the design of microtensile test device.In order to precision controlled,the linear relationship be- tween the magnetic field gradient and the coil excitation current has been achieved.At last,the microtensile test device is described.One end of the sample is attached to a movable rod suspended by leaf springs and the other end is held fixed.Force is applied to the rod by a coaxial electromagnet acting on permanent magnets at- tached to the rod.Displacements are measured with optical fibers.For the coil of a1=0 .0 0 8m,α=2 ,β=1,χ= 0 .77and n=12 80 0 ,the force on the magnets is linear in current with a slope ofΔ F/ ΔI=0 .50 3± 0 .0 1m N/ m A.