脉冲激光沉积法沉积类金刚石薄膜的实验研究

Experimental investigation of diamond-like carbon films deposited by pulsed laser deposition

为了研究脉冲激光沉积法中衬底温度和距离对类金刚石薄膜的影响,首先温度保持在200℃,靶和衬底间的距离分别取25.0 mm和30.0 mm来沉积类金刚石膜。其次温度保持在400℃,距离分别取25.0 mm和30.0 mm来沉积类金刚石膜。用Raman光谱仪对薄膜的微观结构进行检测,用原子力显微镜对薄膜的表面形貌进行检测。实验结果表明:距离增加或者温度升高都会导致类金刚石薄膜的密度和sp^3/sp^2的比值减小,薄膜中石墨晶粒的数量增多和体积增大。近距离时温度的变化和低温时距离的变化对薄膜微观结构产生的影响更明显。距离和温度的变化对类金刚石薄膜的表面形貌也产生显著的影响。

In order to investigate influence of the substrate temperature and distance on diamond-like carbon （DLC） films in the pulsed laser deposition （PLD）, firstly the temperature was kept at 200℃ to deposit DLC film when the graphite target located at 25.0 mm and 30.0 mm from substrate respectively, secondly the temperature was kept at 400℃ to deposit DLC film when the graphite target located at 25.0 mm and 30.0 mm from substrate respectively. The microstructure of DLC films was detected by the visible Raman spectroscopy. The topography of DLC films was detected by the atomic force microscopy （AFM）. The experimental result demonstrates that ratio of sp3/sp2 and the density of DLC film decrease and size and number of graphitic crystallites increase when the temperature or distance increases. The smaller is the distance, the bigger is the influence of temperature on the microstructure of DLC film. The lower is the temperature, the bigger is the influence of the distance on the microstructure. The distance and temperature should influence topography of DLC fihn obviously.