一种基于虚拟基准的太阳帆板平面度测量仪

A Solar Panel Substrate Flatness Measurement Instrument Based on Virtual Datum Plane

本文针对太阳帆板平面度测量这一特定要求 ,开发出了一种基于激光三角原理的特殊结构的光电非接触平面度测量系统。该系统摒弃了传统的大面积工件平面度测量所需要的高精度导轨等实物基准 ,而是通过在计算机中建立高精度的虚拟基准 ,达到了对太阳帆板平面度的高精度测量 。

An optical electrical noncontact solar panel substrate flatness measurement system with a special structure based on laser triangulation principle is introduced in this paper.The system has avoided the traditional precision guiding rail needed by large area flatness measurement and established a high precision virtual datum plane in computer.Thus a high precision solar panel substrate flatness measurement is realized.The image spot characteristic caused by the special instrument structure is analyzed.