用PSD精确测量软质低反光材料

Precision Measurement for Soft and Low reflectivity Material with PSD

介绍一种适用于软质低反光材料检测的半导体激光位置探测器PSD,用半导体激光器和位置探测器件及相关光学数控系统来测量软质低反光材料,进行无接触式高精度测量,被测件表面不损伤,无擦痕,不变形,测量精度高、分辨率高。

This paper describes a kind of semi conductor laser PSD for soft material with low reflective rate. It works with optical system,semi conductor laser and combined numerical control system can noncontactly measure soft material with high precision.The measured surface will not be injured ,deformed and left any scrate.