摘要
对定齿偏置电容式加速度传感器进行了参数设计和优化。通过有限元仿真分析软件计算出其特征频率与典型振动模态,结果表明:传感器具有较大的频率响应范围,检测模态特征频率远小于其他模态,有效减小了交叉干扰。最后,给出了基于MEMS技术的电容式加速度传感器的加工工艺。
The parameters of a micro-capacitive accelerometer were discussed and optimized.The natural frequency and typical modal analysis were carried out by simulation of finite element method.The results show that the frequency response range is wide and the measuring modal frequency is far below other modes,the cross-coupling error can be decreased effectively.The fabrication process based on MEMS technology for making the micro-capacitive acceleration sensor was presented.
出处
《仪表技术与传感器》
CSCD
北大核心
2012年第10期1-3,14,共4页
Instrument Technique and Sensor
关键词
微机电系统
电容传感器
有限元仿真分析
加工工艺
MEMS
capacitive accelerometer
simulation of finite element method
fabrication process
