磁悬浮定位平台的研究综述

Research Review on Magnetic Levitation Positioning Stage

现代制造技术正朝着高速化、精密化和模块化方向发展,这很大程度上得益于定位平台的不断发展。磁悬浮技术可以完全消除库仑摩擦,具有转速高、无磨损等突出优点,在高速、高精运动的定位平台领域具有广阔的应用前景。简述磁悬浮技术的发展与应用,介绍国内外磁悬浮定位平台的科研成果,分析各类磁悬浮定位平台的优缺点,讨论目前研究中的一些热点问题,并指出磁悬浮定位平台亟需解决的关键核心技术,为下一步深入的改进研究提供可借鉴的研究方向。

Modern manufacturing technology is developing towards high speed, high precise and modularity, which is mainly benefit from the improvement of the positioning stage. The magnetic levitation technology can completely remove coulomb friction to make high speed, no wear and so on. These advantages have been used widely in high-speed and high-precision positioning stage. The application of the magnetic levitation technology was introduced. Scientific researches of maglev positioning stage at home and abroad were summarized. Advantages and disadvantages of various types maglev positioning stages were analyzed. Some hot issues about current research were discussed. Core technologies to be solved were pointed out. These contents offer reference direction for improving design.