摘要
采用一维的等离子体流体力学模型研究了氦气-氧气高气压下电容耦合放电过程。分别给出了间隙为1.6,2.4和3.2mm时外加电压的有效值与放电电流有效值特征曲线,并与已有的实验数据作对比,结果表明计算得到的电压-电流特征曲线与实验数据符合得很好。研究发现:氦气-氧气高气压下电容耦合放电过程中荷质比较大的离子在鞘层中的分布随着外电场的变化而变化,而荷质比较小的粒子在整个放电区域基本不随外电场变化而变化;同时杂质形成正负离子在主等离子体区域两端出现了峰值。
The one-dimensional fluid mechanics model of plasma was employed to investigate capacitively coupled discharge in hybrid gas of Helium-oxygen.The relationship between applied voltage and discharge current with gaps of 1.6 mm,2.4 mm,3.2 mm was discussed and compared with the experimental data.The simulation results are in good agreement with the experimental voltage versus current curve.It is found that the charge-to-mass ratio of positive ions has certain effect on ions distribution in the process of the capacitively coupled high-pressure glow discharge.The distribution of the positive ion and negative ion of oxygen reaches its peak values at two terminal areas of the main plasma region.
出处
《强激光与粒子束》
EI
CAS
CSCD
北大核心
2012年第12期2841-2847,共7页
High Power Laser and Particle Beams
基金
国家创新研究群体基金项目(51021005)
国家973项目
国家自然科学基金项目(50707036)
关键词
流体力学模型
电容耦合辉光放电
粒子数密度
空间电荷密度
hydrodynamic model
capacitively coupled glow discharge
particle number density
space charge density distribution
