光学材料光学均匀性的波长调谐两步绝对测量法

Two-Step Wavelength Tuning Absolute Testing Method of the Optical Homogeneity of Optical Material

光学均匀性是光学材料的重要指标,目前高精度的测量方法一般采用绝对测量法,而该方法步骤繁琐,容易受环境影响。根据波长移相干涉仪的移相特点,提出了测量光学材料光学均匀性的波长调谐两步绝对测量法。该方法在波长移相干涉仪中通过平行平板放入测量和空腔测量两个步骤得到平行平板的光学均匀性。在模拟仿真验证方法的正确性后,进行了实验研究,并与传统的绝对测量法的测量结果进行比较。结果表明,波长调谐两步绝对测量法可用于测量平行平板的光学均匀性,且测量步骤简单,精度较高。

Optical homogeneity is one of the most important parameters of optical material. The traditional absolute testing method is considered to be the high-precision way of optical homogeneity measurement. However its corresponding operation procedure is very complex. So it is sensitive to the environmental fluctuation. Based on the characteristics of wavelength tuning, two-step wavelength tuning absolute testing method of the optical homogeneity is presented. It only consists of two measurement steps, with and without the parallel plate as the material in the test arm cavity between transmission flat and reflective flat. The presented method is verified in terms of numerical simulation. And the measurement experiments with both the traditional absolute testing method and the presented method are carried out. In the end, the experimental result shows the validity of the presented testing method. After comparison, it is clear to see that the presented method is of high precision, which is simpler than the traditional one.