模造光学玻璃非球面镜片短波通滤光膜的镀制

Deposition of short-wave pass filter film on molding optical glass aspherical lens

论述了短波通滤光膜的设计原理和计算方法,根据等效折射率和周期性对称膜系的理论,结合短波通滤光膜的技术要求,采用二氧化钛和二氧化硅作为高折射率材料和低折射率材料,计算出短波通滤光膜所需要的周期数和截止带宽度。用膜系设计软件对滤光膜系进行了优化,最终确定了满足实际制备条件的滤光膜周期数和每层膜厚,设计的短波通滤光膜光谱曲线达到了透射率的要求。依照设计结果,采用电子束蒸发的方法,在模造光学玻璃非球面镜片上镀制出符合技术要求的短波通滤光膜。滤光膜经过各种耐环境实验后,各项性能指标满足应用要求。

The design principle and calculation method of short-wave pass filter film was discussed in this paper.According to the technical requirements of filter film, Ti02 and SiO2 were chosen as the materials of high and low refractive indexes, respectively, based on the principle of equivalent refractive index and periodic symmetric film system. Period number and stop band width of filter film was calculated.Filter film system was optimized with the film design software .Period number and thickness of filter film which can satisfy actual depositing conditions were finally presented. The transmittance requirement at designed spectrum curve of the filter film was achieved.Short-wave pass filter film on molding optical glass aspherical lens did meet the technical requirements by electron beam evaporation. Through different experiments of optics and environment, the specification of this film system can meet the requirements of applicable conditions.