摘要
采用射频磁控溅射法在蓝宝石衬底上制备了上组分梯度、下组分梯度及单层BST薄膜,对比研究了三种结构BST薄膜的电、热性能。实验表明:下组分梯度BST薄膜的介电性能最优(优值因子为66.2),温度稳定性能最佳(在25～80℃范围内,介温变化率为7.8%)。此外,实验还运用X射线衍射仪、场发射电子扫描显微镜和透射电子显微镜对BST薄膜的晶体结构进行了研究,运用EDS能谱仪对BST薄膜的组分梯度进行了验证。
The upgraded,downgraded,and uniform barium strontium titanate（BST） thin films were deposited,respectively,by multi-target magnetron sputtering on sapphire substrate.The influencing growth factors,including the sputtering power,substrate temperature and pressure,were evaluated.The microstructures and properties of the BST films were characterized with X-ray diffraction,energy dispersive spectroscopy（EDS）,field emission scanning electron microscopy,and transmission electron microscopy.The results show that the downgraded BST films have the best dielectric properties（a figure of merit of 66.2）,and the highest temperature stability（dielectric dispersion of 7.8% in the range of 25～80℃）.
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2012年第11期955-960,共6页
Chinese Journal of Vacuum Science and Technology
基金
航天科工集团支撑基金项目
湖北省自然科学基金项目(2007ABA112)
关键词
梯度薄膜
磁控溅射
温度稳定性
EDS线扫描
Graded thin film
Magnetron sputtering
Temperature stability
EDS line scanning
