离子束轰击诱导硅表面纳米结构和铁纳米条纹

Formation of Fe Nano-Ripples and Nano-Structures on Si Surfaces Induced by Ion bombardment

研究了氩离子束轰击诱导硅表面自组装纳米结构和铁纳米条纹的形成规律。在单晶Si(100)表面水平放置直径为2mm的铁棒,采用3 keV氩离子束垂直轰击硅样品表面。扫描电镜观察表明:在金属铁棒周围由近及远,硅表面形成纳米条纹和纳米点阵,纳米条纹向纳米点阵的过渡形貌为链状纳米椭圆结构;并在铁棒区域自组装出金属铁纳米条纹。通过阻尼Kuramoto-Sivashinsky方程对离子束作用下固体表面纳米结构的形成机理进行了合理的诠释与讨论。

We addressed the formation of Fe nano-ripples and nano-structures on Si（100） surfaces,induced by ion beam bombardment.The self-assembled nano-structures were characterized with scanning electron microscopy.The observation originated from the Fe-rod,2 mm in diameter,sitting on Si surface,and bombarded by the argon ion beam with energy of 3 keV.The formation of the nano-ripples near the edge of the Fe rod,and the nano-dot arrays next to the nano-ripples,and farther away from the Fe rod were observed on Si surfaces.Besides,the nano-ellipse chains exist in the transition region from the nano-ripples to the nano-dots.The ripple near the Fe rod was found to be self-assembled Fe atoms.The nanostructure formation was simulated with the damped Kuramoto-Sivashinsky equation to tentatively understand its possible mechanisms.