摘要
光谱共焦位移测量系统具有精度高、质量轻、体积小和灵敏高等优点,可以实现在各种极端情况下的微位移测量。在光谱共焦测量系统中色散透镜组的色散特性决定了整个测量系统的性能。对色散透镜组的测量需求进行了分析,提出了详细的设计指标,基于折射、衍射两种方法对透镜组进行了设计和优化,给出了设计结果。色散透镜组的色散范围为2.2mm,光谱范围为500～700nm,线性度较好。利用分辨率为0.5nm的光谱仪接收光谱信息,理论上精度优于2μm。
Chromatic confocal measuring system with high precision, light weight, small volume, high sensitivity can realize the measurement of micro displacement in extreme situations. The dispersion characteristics of dispersive lens group affect the performance of the whole measuring system in a great extent. After making a full analysis of the measuring requirements, the detailed design features are put forward, the design and optimization of dispersive lens group in two ways are completed. The dispersion range is 2. 2mm, the spectral range is 500nm to 700nm, and the linearity is good. Using spectrometer with 0. 5nm resolution, the measuring accuracy is better than 2μm in theory.
出处
《光学技术》
CAS
CSCD
北大核心
2012年第6期660-664,共5页
Optical Technique
基金
北京市教委科研计划项目"基于扫描色散共焦显微术的三维表面形貌测量"(SQKM201211232006)
关键词
光谱共焦
微位移测量
衍射光学元件
色散透镜设计
chromatic confocal
micro displacement measurement
diffractive optical elements
lens design
