不同氧化条件下的铝阳极氧化膜形貌研究

The morphology of anodic aluminum oxide films formed under different anodizing conditions

在硫酸电解液、改性的硫酸电解液及有机酸性电解液体系中进行了铝阳极氧化。采用扫描电镜对氧化膜的形貌及自组织行为进行了研究。结果表明,在硫酸电解液中加入一定量的草酸和易挥发的醇类物质后,能显著降低对氧化膜的化学溶解,在其中可以进行较长时间的阳极氧化并能得到较厚的氧化膜。延长氧化时间能显著提高氧化膜构型的规整度;且该规整度沿着膜孔的纵向方向变化,越靠近孔底部位构型越规整。氧化膜的稳定生长电压与单元尺寸或孔间距之间符合线性关系,比例系数约为2.4 nm/V。

Anodic aluminum oxide（AAO） films have been prepared in sulfuric acid,modified sulfuric acid and organic acidic electrolytes.The morphology and extent of ordering of the oxide films were observed by scanning electron microscopy.By appropriate choice of conditions,it was found that chemical dissolution of the oxide can be significantly decreased and intact oxide films with larger thickness can be prepared.The extent of ordering was clearly improved as the anodizing duration was prolonged.The extent of ordering varies along the vertical direction of the pore channels and more ordered film structures can be observed in the vicinity of barrier layer.The relation between the anodizing voltage and AAO unit cell dimension conforms to a linear rule,with a correlation ratio of about 2.4 nm/V.