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Modeling of subthreshold characteristics for undoped and doped deep nanoscale short channel double-gate MOSFETs

Modeling of subthreshold characteristics for undoped and doped deep nanoscale short channel double-gate MOSFETs
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摘要 A model of subthreshold characteristics for both undoped and doped double-gate (DG) MOSFETs has been proposed. The models were developed based on solution of 2-D Poisson's equation using variable separa- tion technique. Without any fitting parameters, our proposed models can exactly reflect the degraded subthreshold characteristics due to nanoscale channel length. Also, design parameters such as body thickness, gate oxide thick- ness and body doping concentrations can be directly reflected from our models. The models have been verified by comparing with device simulations' results and found very good agreement. A model of subthreshold characteristics for both undoped and doped double-gate (DG) MOSFETs has been proposed. The models were developed based on solution of 2-D Poisson's equation using variable separa- tion technique. Without any fitting parameters, our proposed models can exactly reflect the degraded subthreshold characteristics due to nanoscale channel length. Also, design parameters such as body thickness, gate oxide thick- ness and body doping concentrations can be directly reflected from our models. The models have been verified by comparing with device simulations' results and found very good agreement.
出处 《Journal of Semiconductors》 EI CAS CSCD 2012年第12期27-30,共4页 半导体学报(英文版)
基金 Project supported by the Fund of Liaoning Province Education Department(No.L2012028)
关键词 DOUBLE-GATE MOSFETS deep nanoscale MODELING double-gate MOSFETs deep nanoscale modeling
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参考文献14

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