多频激励信号对离子能量分布的影响

Effects on ion energy distribution of multiple frequencies' driven

在等离子体多频电容放电过程中不同频率的电压、谐波、频率、是如何影响离子的能量分布,分析和把握这种现象和成因机制,对于更好地控制集成电路蚀刻等微处理技术,以及对等离子体物理基础理论研究均有重要作用。着重讨论高低频(双频)激励电容耦合放电过程中的粒子能量分布函数(IEDs),从理论分析推导出多频激励信号的离子能量分布函数计算模型。通过该计算模型可以分析和预测不同高低频激励的离子能量分布,计算结果与目前国内外公开发表学术期刊研究的相关结论基本吻合。

It is important to analyze the phenomenon and of the way the vo]tages, resonant and frequencies influence are on the ion energy distributions （IEDs） from multiple frequencies driven in capacitive dis- charges in order to control the microelectronic processes of integrated circuit and develop the base theories of plasma physics. The paper focuses on the function of the ion energy distributions under high and low frequencies （ dual fre- quency） drive in capacitive discharges and derived a model of computation of the multiple frequencies driven IEDs from analyzing theories. The model can analyze and predict the IEDs under different high and low frequencies driven, the results from the model are in good agreement with the important data in public magazines.