摘要
金刚石的许多性质(例如,高硬度、高弹性模量、高屈服强度、化学惰性、低摩擦系数和高热传导)使它成为微结构器件的优异材料。现已证明金刚石薄膜有压阻效应,这个性能打开了金刚石薄膜在压力传感器领域的应用。研究了金刚石薄膜的欧姆接触、热敏特性和压阻特性。研究表明金刚石薄膜可制成适于高温工作的传感器。
Many properties of diamond (e.g. its physical hardness, high Young's modulus, high tensile yield strength, chemical inertness, low coefficient of friction and high thermal conductivity) make it an excellent material for micromechanical device applications. It has been established that diamond films have piezoresistivity. This property enables diamond films to be used in the field of pressure sensor applications. This paper studies electrical characteristics of ohmic contacts and thermal-sensitive charactnstics and how resistance changes in response to pressure applied on diamond films. The results show that diamond films can be used to make sensors for high temperature.
出处
《材料导报》
EI
CAS
CSCD
北大核心
2000年第8期71-74,共4页
Materials Reports
基金
"金刚石薄膜压力传感器的研究"(编号:863-715-002-0060)
