纳米金红石相TiO_2的制备及其介电性能实验研究

Growth of Nanostructured Rutile-phase TiO_2 Materials and Its Dielectric Properties

在等离子体增强多弧镀膜装置上通过反应离子镀方法制备出了较纯净的纳米金红石相TiO2 ,其平均晶粒尺寸为8 5nm。通过对在 2 0MPa下压制成形的纳米金红石相TiO2 块材进行介电频谱测试 ,发现在f<0 1kHz的低频区 ,纳米金红石相TiO2 的相对介电常数异常大 ,比传统粗晶材料提高了 1～ 2个数量级 ;其介电损耗随频率的增加而先减小后增大 ,在

The nanostructured rutile phase TiO 2 film was synthesized on glass substrate by reactive ion plating in a plasma enhanced physical vapor deposition (PEPVD) system.TiO 2 removed from the glass substrate was first annealed at 280 ℃ for 10 hours and then studied with X ray diffraction for composition analysis.Next it was compressed under 20 MPa into a sheet,150 μm in thickness.The sheet sample was studied with a LCR to determine the frequency spectra of its dielectric constant and its dielectric loss.We found that the dielectric constant of the nanostructured sample is 10～100 times higher than that of the coarse grained samples in the low frequency range ( f <0 1 kHz).However,the dielectric loss decreases at first and then increases with increasing frequency,reaching a minimum at about 1 kHz.