摘要
介绍了一种新型的基于聚焦探测法的自动焦点跟踪传感器 ,该传感器可实现表面形貌的快速、非接触测量 ,其垂直测量范围为 50 0 μm ,最高分辨率为 3nm。文中详细叙述了该传感器的工作原理、关键技术的实现及其应用。
A focus tracing sensor based on focus detection for measuring surface topography is introduced. This sensor can realize fast, non contact measurement of surface topography with a maximum vertical measuring range of 500 μm and a resolution of better than 3nm. Its basic principles, key techniques and its applications are also described.
出处
《计量学报》
CSCD
北大核心
2000年第3期173-177,共5页
Acta Metrologica Sinica
基金
国家自然科学基金! (5 95 75 0 83)
关键词
表面形貌
非接触测量
聚焦探测
焦点跟踪测量
Surface topography
Non contact measurement
Focus detection
Servo control
