超光滑表面三维微观轮廓检测的研究

Research on Profilometry for Super-smooth Surface

利用干涉共模抑制和光电信号共模抑制技术 ,辅以二维扫描平台及计算机控制与数据处理技术 ,可以高精度地无损测量超光滑表面三维微观轮廓。本文论述了上述测量系统的原理、结构和误差分析 ,并讨论了关于三维微观轮廓的定义问题。

By laser interference and electrical common mode rejection and with the help of the two dimension scanning and computer, the profile of a super smooth surface can be detected three dimensionally and non destructively with the vertical resolution better than 0 1 nm and the lateral resolution better than 2 μm. In this paper, the principles, structure and error analysis about the profile detection are given. The three dimensional profile is also discussed.