摘要
采用Fluent、Templot等相关软件对PECVD布气装置气流的流动过程进行模拟,并进行可视化分析;得出气流入口采用直口开孔方式,同时,气流入口到布气板距离L=4.5mm时布气最均匀,这为均匀布气装置的研制提供了依据。
Using Fluent, Templot and other related software on PECVD, analysis and visualization the gas distributor on the flow process simulation. The device adopts the intake way of straight opening hole and a straight port. The distance between air inlet gas and distribution plate is 4.5mm ,where the gas distribution is uniformity. It provides the basis for the uniform gas distribution device is developed.
出处
《现代制造工程》
CSCD
北大核心
2012年第12期93-96,123,共5页
Modern Manufacturing Engineering
基金
上海汇盛电子机械设备有限公司技术开发基金项目(D11-0109-08-010)
