可变电容静电型超微电机的优化设计

Optimization Design of Variable Capacitance Electrostatic Micromotor

可变电容静电型超微电机是一类最早出现的动态MEMS器件。针对其静电力十分微小,且动态性能非常有限,给出了侧面驱动可变电容静电型超微电机的数学模型,并对定子采用单相对称电极顺序通电方式进行驱动,在此基础上提出了优化设计方法。实验结果表明,优化后电机的输出力矩有所增大,而且波动明显减小,有利于改善电机输出功率的稳定性。

Variable capacitance electrostatic micromotor is a kind of the earliest dynamic MEMS device. According to the electrostatic force is small, and the dynamic performance is inherently limited, the mathematical model of the variable capacitance electrostatic micromotor was presented, and a kind of optimization design method was proposed when the stator single-phase symmetric electrode were sequentially energized to drive the micromotor. The experimental results indicate that after the optimization, the output torque of the motor is increased, and the fluctuate significantly reduced, conducive to the improvement of motor output power stability.