摘要
结合理论分析和文献报道对现有柔性触觉传感器的主要技术进行了归纳总结,主要包括微机电系统(MEMS)的压阻原理,通过惠斯顿电桥将力转换成电量的基本原理,基于新型材料聚偏二氟乙烯(PVDF)的压电特性,电介质的力学性质与电学性质的耦合作用,以及基于导电橡胶的柔性触觉传感器导电机理和压阻效应。概述了3种主要技术物理特性,总结了3种主要技术应用在柔性触觉传感器上的优缺点和在各个领域上的实际应用,提出了触觉传感器一些有待解决的问题和研究方向。
Main technologies of flexible tactile sensor is summarized combined with theoretical investigations and reported literatures. Mainly includes MEMS pressure-resistance principle, and the force through the Wheatstone bridge is converted to electricity of the basic principle. Based on the PVDF piezoelectric property, the coupling effect of the dielectric mechanical properties and electrical properties. The conductive mechanism and the piezoresistive effect of flexible tactile sensor based on conductive rubber. The physical properties and advantages and disadvantages of three main technologies, the practical application in various fields are summarized. Some problems to be solved and research direction of tactile sensor is presented.
出处
《传感器与微系统》
CSCD
北大核心
2012年第12期1-4,8,共5页
Transducer and Microsystem Technologies
基金
国家自然科学基金资助项目(51167008)
