同面多电极电容传感器结构仿真研究

Simulation study on structure of coplanar capacitive sensor with multi-electrode

通过电磁场有限元分析软件ANSYS仿真同面双电极结构电容传感器在极板长、宽、间隙的不同组合下对电容变化率的影响,得出极板长、宽、间隙的最佳组合,构建了同面八电极电容传感器,分析比较在地屏蔽、极间屏蔽、外围屏蔽下传感器极板间电位分布和在不同屏蔽下传感器的灵敏度。仿真表明:增加屏蔽后不仅可以提高传感器的灵敏度,还可以获得比较均匀的敏感场。仿真研究结果为同面多电极电容传感器的结构设计提供了依据。

Based on the software ANSYS,a coplanar capacitive sensor with 2-electrode structure is developed. A simulation study on effect of different combination of the gap, length and width of the electrode on capacitance change rate is carried out, and the best combination is obtained. A model of 8-electrodes of the coplanar capacitive sensor is established. The potential distribution and the sensitivity of the sensor is analyzed under the ground shield ,gap shield and outer shield. Simulation result shows that increasing shielding can not only improve the sensitivity of sensor but also can get a uniform sensitive field. The result of the simulation provide basis for structure design of coplanar muhi-electrode capacitive sensor.