显微干涉系统测量微细图形的台阶高度

Step-height Measurement Using Microscopic Interferometry

介绍了显微干涉系统测量微细图形台阶高度的方法。从理论和设计角度分析了干涉条纹形状、间隔、对比度及稳定性，对该系统进行了实验，实验结果表明，对比度Ｋ＞０．８，测量精度优于８ｎｍ。

This paper describes a method for measuring stepheight by means of microscopic interferometry. An analysis for interference fringe form, interval, contrast and stability was made both theoretically and experimentally. Experiments were made with this system. The results show that the contrast K is larger than 0.8 and the measurement accuracy is improved (less than 5nm).