可用于沉积透明导电氧化物薄膜的柔性衬底研究进展

Research Progress in Flexible Substrates Used for Depositing Transparent Conductive Oxide Coatings

柔性衬底表面沉积TCO薄膜具有许多独特的优点且应用广泛。但柔性衬底存在不耐高温的缺点,如何选择合适的柔性衬底,在表面沉积TCO薄膜过程中至关重要。简单介绍了各种柔性衬底的相关性能,阐述了当前国内外在该领域中各柔性衬底的研究成果,展望了未来柔性衬底的选择及应用趋势。

TCO coatings deposited on the surface of flexible substrates have many special advantages, and are used in many fields. But it also have one shortage, which is not to endure high temperature, so it is very important to choose right flexible substrates for depositing TCO coatings. The related properties and foreign and domestic research progress of flexible substrates are introduced, and the prospect of the flexible substrates choosing and pre-treating are given.