大面积氮气均匀介质阻挡放电发射光谱研究

Optical Diagnosis of Large Area Homogenous Dielectric Barrier Discharge in Nitrogen at Atmospheric Pressure

采用板-板式电极结构在大气压氮气中成功地获得了具有工业应用前景的大面积均匀介质阻挡放电等离子体。利用发射光谱技术测量了N2(C3Πu→B3Πg)和N2+(B2Σu+→X2Σg+0-0 391.4nm)的发射光谱,并研究了应用电压和驱动频率对N2(C3Πu→B3Πg)和N2+(B2Σu+→X2Σg+0-0 391.4nm)发射光谱强度的影响。结果表明,当应用电压小于6kV时,N2(C3Πu→B3Πg)和N2+(B2Σu+→X2Σg+0-0 391.4nm)的发射光谱强度随应用电压增大变化较小,进一步升高应用电压时,等离子体发射光谱强度陡然增强。本文还讨论了激发态N2+(B2Σu+)离子在纯N2和He+N2混合气体中介质阻挡大气压均匀介质阻挡放电下的主要产生机制。

In the present study,dielectric barrier homogenous discharge in nitrogen was obtained between large plate electrodes（150×300 mm） at atmospheric pressure and the emission spectra of N2（C3Πu→B3Πg） and N＋2（B2Σ＋u→X2Σ＋g 0-0 391.4 nm） were recorded.It was found that both the emission intensities of N2（C3Πu→B3Πg） and N＋2（B2Σ＋u→X2Σ＋g 0-0 391.4 nm） increase with the rising of the applied voltage and the driving frequency,respectively.The main physicochemical formation mechanism of N＋2（B2Σ＋u） in N2 and He＋N2 mixtures homogenous discharge was discussed,and the penning ionization was proved to be the dominant formation mechanism.