基于LabVIEW的半导体器件检测系统设计

Design of measurement system for semiconductor devices parameter based on LabVIEW

为实现半导体器件检测过程自动化,减少人为误操作,提高测量的效率,以LabVIEW 9.0为检测系统的开发平台,设计了半导体器件参数自动测试系统。首先介绍了该系统开发需要的软、硬件资源,详细介绍了软件设计流程及功能实现部分,该系统实现了对半导体器件的检测和对仪器的控制功能,并提供了数据存储、图形显示、错误报警等功能。实验结果表明,系统具有良好的人机对话界面,操作方便,且程序拓展性好,为其他同类型器件测量程序的开发缩短了周期。

In order to reduce error prone to test devices by hands and improve the reliability of the measurement. An automatic testing system is designed regarding LabVIEW 9.0 as a platform in this paper. The hard/software sources of this system particularly software design and its interface realization are introduced. The experimental results show that it works stable and reliable operation. Lastly it has good extendability in program.