摘要
给出一种以激光外差干涉仪为基准，用计算机实现自动控制、数据采集、动态检测、误差分析和列表输出等多项功能的光栅尺高精度自动检测系统．与传统检测方法相比，具有精度高、自动化程度高、速度快和测量结果直观清晰等优点．该系统现已用于大批量生产的光栅尺检测．
A precise and automatic testing system based on laser heterodyne interferometer for optical grating is presented in this paper. The error data of the grating are collected and processed dynamically.Compared with general method, the system can test a grating automatically in 15 seconds. Error gra-phics, error data files, and other parameters can also be printed immediately. The system is at present used in industrial manufaturing of optical grating.
出处
《深圳大学学报（理工版）》
CAS
2000年第1期37-42,共6页
Journal of Shenzhen University(Science and Engineering)
基金
广东省科委重点科技攻关项目
深圳市科技局资助!9708
关键词
激光外差干涉仪
光栅尺
动态自动检测
heterodyne interferometer
optical grating
dynamic automatic testing
data analysing and processing
