MOCVD制备Mo_2C膜成膜机理

Research on Mechanism of the MOCVD Preparation of Mo_2C Film

对MOCVD制备Mo2 C膜的物理化学机理进行理论探讨。根据实验结果论证了MOCVD制备Mo2 C膜过程中 ,Mo(CO) 6遵从先被基底吸附、发生相变再进行分解的两步机制 ;Mo(CO) 6的分解过程是级联式分解 ,最后由Mo碳化为Mo2 C膜 ;利用Gibbs函数最小的原理 ,对MOCVD沉积Mo2 C膜化学反应的吉布斯函数进行计算 。

The paper intends to go theoretically into the mechanism of physical chemistry of the preparation of Mo 2C film by using MOCVD.It has proved,by the result of experiment,in the process of the preparation of Mo 2C,that the two-step mechanism which Mo(CO) 6 should follow:firstly,Mo(CO) 6 is absorbed by the fundamental bottom and does a phase change;and secondly,it is decomposed.the process of decomposition of Mo(CO) 6 is a sequential one,which is finally carbonized into Mo 2C film from Mo.By applying Gibbs functional smallness principle to the calculation of Gibbs function of chemistry reaction in MOCVD when it deposits Mo 2C film,the best temperature of preparing film is probed.