应用于引信固态安全系统的硅微加速度传感器研究

Study on Silicon Micro-accelerometers Applied to Fuze Solid State Safety System

微机电系统 (MEMS)将对引信的发展提供其它技术不可比拟的技术支撑。该文论述了基于MEMS引信固态安全系统的概念及作用原理 ;针对可应用于引信安全系统的硅微压阻式加速度传感器 ,用有限元法计算了不同厚度悬臂梁结构在1 0 0 0 0 g加速度作用下的应力分布、固有频率 ,设计了力敏电阻电桥结构 ,并计算了传感器的灵敏度。最后介绍了压阻式悬臂梁结构的加速度传感器制作工艺。

MEMS will provide a technology support that other technologies could not do for development of fuze. This paper describes the conception and principle of fuze solid safety and arming system based on MEMS. For silicon piezoresistive accelerometers applied to fuze safety and arming system,finite element method is used to calculate the stress distribution of cantilever beam with a different thickness under acceleration of 10000g,inherent frequency,to design piezoresistor bridge,to compute sensitivity of sensor.The fabrication of piezoresistive accelerometer is also introduced.