可见与近红外激光通信系统光学滤光膜的研制

Fabrication of Optical Filter Film for Visible and Near-Infrared Laser Communication System

在空间光通信中,光学系统起着非常重要的作用,光学薄膜技术已成为制作光学元件的关键技术。对532、808、1064、1550nm激光工作的4个波段,选择Ti3O5和SiO2作为高低折射率材料,借助于膜系设计软件,采用电子束蒸发和离子辅助沉积的方法设计并制备了激光滤光膜。镀膜后的基片在808nm处的透射率大于90%,532、1064、1550nm处的反射率均大于99%。重点解决了808nm透射区半波孔的问题,通过对基片进行清洁、减少薄膜的吸收和进行真空退火等方法提高了膜层的激光损伤阈值。经过性能测试和评估,满足系统的要求。

Optical system plays an important role in space optical communication, and optical thin-film has become the key technology of the optical components. The laser filter film is designed and fabricated aiming at four bands of laser work of 532, 808, 1064, 1550 rim, by chosing Ti3O5 and SiO2 as high and low refractive index materials. It is used the design software of film system and adopts the method of electron beam evaporation and ion assisted deposition. The transmissivity of substrate after coating film at 808 nm is better than 90 %, at 532, 1064, 1550 nm, reflectance is better than 99 %. It is focused on half-wave hole in 808 nm transmission area and improved the laser damage threshold of film by cleaning the substrate, reducing the absorption of the film and vacuum annealed. The laser clear filter meets the requirements of the system after a performance test and evaluation.