紫外胶在聚合物准矩形电光波导中的应用

Application of Ultraviolet Photo-Resist in Polymeric Quasi-Rectangle Electro-Optical Waveguide

基于聚合物材料的波导型电光器件对提升光通信网络的带宽容量具有重要的意义。设计并制备了一种基于有机/无机杂化非线性材料的准矩形聚合物电光波导,采用SiO2作为下包层,紫外胶SU-8作为引导芯层,掺有生色团DR1的有机/无机杂化非线性材料DR1/SiO2-TiO2作为电光层,通过优化感应耦合等离子体刻蚀工艺的天线功率、偏置功率和氧气流量,将SU-8同时作为引导芯层和刻蚀工艺的掩模,制备了准矩形电光波导。实验测得波导传输损耗为-3.5dB/cm。

The polymer waveguide electro-optic （EO） devices play a key role in improving the optical network bandwidth and capacity. A quasi-rectangle EO waveguide based on organic/inorganic hybrid material （OIHM） is designed and fabricated. SiO2 is adopted as the lower cladding. The ultraviolet photo-resist SU-8 is used as the guiding core. The chromophore of dispersed red 1 （DR1） doped OIHM is used as the EO active layer. Through optimizing the parameters including antenna power, biasing power and 02 flow rate of inductively coupled plasma （ICP） etching, SU-8 can be applied as the guide core and etching mask at the same time. By the traditional semiconductor processes, the quasi-rectangle EO waveguide device is successfully fabricated. Under this condition, the transmission loss is -- 3.5 dB/cm.