锗基底的红外增透膜的研究

Study on IR AR film on Ge substrate

类金刚石薄膜因其优异的物理化学性能而具有广泛的应用,本文结合于锗在红外光学应用所具有不足,采用化学气相沉积方法,在锗基底表面制备类金刚石膜作为红外增透膜。对制备的样品进行傅立叶红外光谱和红外透射光谱进行测试,测试结果表明,类金刚石膜是锗基底的理想的红外增透膜。

Diamond-like carbon(DLC) has been the emerging focus in material fields due to its outstanding physical and chemical properties.In this paper,We propose a new method of coating Diamond like carbon film by PECVD as IR AR film,and test the sample by FTIR and IR spectrum.As a result,DLC film is good at AR character for Ge substrate.