电真空器件内部可移动多余物检测方法研究

Study on the Detection of Movable Remnant Particles in the Cavity of Electronic Vacuum Device

腔体电真空器件内部可移动的多余物是引起元器件失效的原因之一,目前用于器件内部可移动多余物的常用检测手段是随机振动(SRT)和颗粒碰撞噪声检测(PIND)。对比两种检测方法对缺陷产品的检出率,给出比较合理的电真空器件可移动多余物的检测流程,以期尽可能地提高缺陷产品的检出率。

Movable remnant particles in the cavity of electronic vacuum device is one of the factors arousing device failure. Present methods to detect movable remnant particles in the cavity of device are Stochastic Resonance Test （SRT） and Particle Impact Noise Detection （PIND） Based on the detection rates comparation method, in order to increase the detection movable remnant particles in vacuum device. between these two methods, an optimised rates of the defective product for detecting.