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微机电系统磁场传感器信号处理电路 被引量：1

Signal Processing Circuit of MEMS Magnetic Field Sensor
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摘要 介绍了一种微机电系统(Micro-electro-mechanical system,MEMS)磁场传感器微弱信号处理电路的设计,该处理电路是MEMS磁场传感器的重要组成部分,该电路由放大电路和滤波电路构成。对设计的处理电路进行模拟分析和实验测试,处理电路性能良好。外接MEMS磁场传感器后对传感器性能进行测试,传感器的电流-电压特性以及磁场-电压特性符合最初的设计要求,灵敏度可以达到14mV/mT。实验表明该电路对输出信号进行了放大,并有效地抑制了噪声,且有良好的灵敏度。 A design of a micro-electro-mechanical system（MEMS） weak signal processing circuit of mag- netic field sensor is described. The processing circuit is an important part of the magnetic field sensor, including an amplifier circuit and a filter circuit. The performance is good in line with the original design requirements through circuit analysis and experimental testing. The current-voltage characteristics and the magnetic field-voltage characteristics of the sensor are verified by experiment with the sensitivity of 14 mV/mT. The experiments show that the signal is effectively amplified, the noise is suppressed and the circuit has good sensitivity.
作者 陈洁 秦明
机构地区 东南大学MEMS教育部重点实验室
出处 《南京航空航天大学学报》 EI CAS CSCD 北大核心 2012年第6期835-839,共5页 Journal of Nanjing University of Aeronautics & Astronautics
基金 国家自然科学基金(61201032)资助项目
关键词 放大电路 滤波电路 感生电动势 磁场 amplifier circuit filter circuit induced electro motive force magnetic field
分类号 TP212.1 [自动化与计算机技术—检测技术与自动化装置]
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参考文献14

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二级参考文献12

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共引文献5

同被引文献11

引证文献1

南京航空航天大学学报
2012年 第6期

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