期刊文献+

真空中不同转速和对偶对a-C:H膜摩擦学性能的影响 被引量:4

Effect of Rotational Speeds and Mated Balls on the Vacuum Tribological Properties of a-C∶H film
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摘要 非晶碳氢(a-C∶H)薄膜作为空间润滑材料有很大的应用前景,它在真空中的摩擦磨损行为与掺杂元素、摩擦对偶、滑动速度等因素有关。采用中频非平衡磁控溅射法在AISI202不锈钢和p(111)单晶硅基体上沉积了厚度为1.3~1.6μm的a-C∶H膜以及Cr、MoS2掺杂的a-C∶H复合膜。采用球盘摩擦试验机对3种膜的真空摩擦学行为进行了研究,摩擦性能较好的薄膜在真空中进行了GCr15、Si3N4和C不同对偶以及100、500、1000r/min的不同转速摩擦实验。结果表明:在沉积气压为5.3×10-1 Pa,Ar和CH4的气体流量比为1∶1,单纯溅射石墨靶(溅射电流12A)的条件下,制备的a-C∶H薄膜在真空中的摩擦因数最低(0.005),寿命相对最长;对偶对a-C∶H膜的摩擦因数影响不大,但薄膜的耐磨寿命随着对偶硬度的增加而降低;随着转速的增加,a-C∶H膜的摩擦因数和耐磨寿命均降低。 Remanufacturing in China is still in its early stage and faces various pressures from society, policy, technology and management. Considering the actual states of remanufacturing in China, this paper researches several key management issues that are cared by various aspects from angle of view of remanufacturing players. Based on the trend of development of remanufacturing in China, five key management issues are mainly researched, risk management of remanufacturing players, remanufacturing production management, remanufacturing quality management, authentication mode of remanufacturing in China, and performance assessment of remanufacturing. The characteristics of six issues are analyzed and the corresponding countermeasures are put forward.
出处 《中国表面工程》 EI CAS CSCD 北大核心 2012年第6期90-95,共6页 China Surface Engineering
基金 国家自然科学基金(51275509 51175491) 国家基础研究发展计划(973计划)(2013CB632300)
关键词 非晶碳氢膜 掺杂膜 对偶 转速 amorphous hydrogenated carbon film doped film counterpart ball rotating speed
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参考文献22

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同被引文献40

  • 1陈光良,葛袁静,张越飞,张广秋,张谷令,王久丽,刘元福,顾伟超,冯文然,刘赤子,杨思泽.高阻隔碳氢膜的制备及性能研究[J].物理学报,2005,54(2):818-823. 被引量:4
  • 2于翔,张旭,王成彪,刘兴举,傅玉娜.四面体无定型无氢非晶碳膜的制备及其摩擦学性能研究[J].摩擦学学报,2005,25(2):135-139. 被引量:6
  • 3谢凤,朱江.固体润滑剂概述[J].合成润滑材料,2007,34(1):31-33. 被引量:19
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