磁控溅射制备TiCN复合膜的微结构与性能

Microstructure and properties of TiCN composite films prepared by magnetron sputtering

通过磁控溅射技术制备一系列不同石墨靶功率的TiCN复合膜。分别利用X射线衍射仪、纳米压痕仪和高温摩擦磨损仪研究薄膜的微观结构、力学性能及室温和高温摩擦磨损性能。结果表明：随着石墨靶功率的增加,TiCN（111）峰逐渐宽化,晶粒尺寸逐渐减小,薄膜最后接近非晶结构。薄膜的硬度与弹性模量呈先增大后减小的趋势,在石墨靶功率为90 W时薄膜的硬度和弹性模量最大,分别为28.2和230 GPa。随着石墨靶功率的增加,室温下TiCN复合膜的摩擦因数逐渐减小,TiCN复合膜的耐磨性能明显提高。当环境温度升高到300~500℃时,TiCN薄膜的摩擦因数明显增大。TiCN复合膜的摩擦磨损性能受薄膜微观结构、空气中的水蒸气和氧气及环境温度等一系列因素的影响。

A series of TiCN nano-composite films with different powers of graphite target were prepared by magnetron sputtering technique.The microstructure and mechanical properties and friction and wear properties at room and high temperature of the films were investigated by X-ray diffractometer,CSM nano-indentation and high-temperature ball-on-disc tribometer.The results show that with the increase of the power of graphite target,the peak of TiN（111） becomes broad while the size of the grain becomes small,and the structure is close to the amorphous structure eventually. Along with carbon join,the films are hard and the hardness and elastic modulus increase.When the power of graphite target is 90 W,the two parameters reach the highest,28.2 and 230 GPa,respectively.The friction coefficients of TiCN films at room temperature decrease and the traction-resistance property is obviously improved with increasing the power of graphite target.When the temperature reaches 300-500 ℃,the friction coefficient of TiCN films increases.The friction and wear properties of TiCN composite films are influenced by a series of factors such as the microstructure, water vapor and oxygen in the air and the ambient temperature.