基于多弧离子镀复合技术的膜层结构及性能研究

Research on Film Structure and Properties of Ion Plating Technology Based on Multi-arc

应用离子渗氮与多弧离子镀复合技术在40Cr基体上制备Ti1-xAlxN复合膜层,采用扫描电镜、XRD分析仪、显微硬度仪与划痕仪研究Al含量对膜层表面结构与性能的影响。结果表明:Al含量对膜层结构与性能有显著影响。Al含量越高,膜层中液滴越多,相结构趋于多相混合结构。Al含量的升高使显微硬度与结合力先上升后降低。

Til-ALN composite coating on 40Cr matrix was prepared by ion nitriding and multi-arc ion plating technology. The effects orAl content on the surface structure and properties of the coating were studied using SEM, XRD, micro hardness tester and scratch test. The results show that the A1 content on the structure and properties oral films has significant influence. The higher A1 content, more film drops, phase structure tends to multiphase mixed structure. The hardness and adhesion increase first and then decrease with A1 content increasing.