摘要
采用聚二甲基二烯丙基氯化铵(PDDAC)作为敏感膜材料,以聚酰亚胺(PI)薄膜为柔性衬底制备了气敏元件,利用能谱分析(EDX)和原子力显微镜(AFM)对PDDAC敏感膜的组成和形貌进行了表征,通过检测元件电阻随氨气浓度的变化对元件的氨敏性能进行了研究。结果表明:室温下,该元件对体积分数为200×10–6的氨气的响应灵敏度为82%,且具有较好的响应-恢复特性,响应时间和恢复时间分别为68 s和63 s。
A novel kind of flexible room temperature gas sensor was fabricated by deposited poly-dimethyldiallylammonium chloride(PDDAC) on the flexible polyimide(PI) substrate.The composition and morphology of the sensitive membrane were characterized by energy dispersive X-ray detector(EDX) and atomic force microscopy(AFM).The ammonia-sensing performance of the prepared sensor was studied by testing the resistance that varied with the ammonia concentration.The results indicate that the response sensitivity of the sensor is 82% to NH3 with volume fraction of 200×10–6 at room temperature,moreover,such sensor exhibits superior response-recovery characteristics,and their response time and recovery time are 68 s and 63 s respectively.
出处
《电子元件与材料》
CAS
CSCD
北大核心
2013年第1期31-33,共3页
Electronic Components And Materials
基金
国家"973"计划资助项目(No.2009CB939703)
中国科学院"先导专项"资助项目(No.XDA06020102)
关键词
柔性衬底
聚二甲基二烯丙基氯化铵
室温
氨敏性能
flexible substrate
poly-dimethyldiallylammonium chloride(PDDAC)
room temperature
ammonia-sensing performance