小型电容薄膜真空规的设计

DESIGN OF MINIATURE CAPACITANCE DIAPHRAGM VACUUM GAUGE

商用电容薄膜真空规存在体积大、重量重等问题,无法满足深空探测中真空测量需求,因此设计了一种小型电容薄膜真空规。设计中采用倒T型结构固定极板和防热变形结构,防止测量过程中温度变化导致的规管部件热变形;采用面积相同的双电极结构,消除测量过程中外界杂散电容和温度变化引起的测量信号偏差。小型电容薄膜真空规整体尺寸为Φ42×24 mm,重量小于200 g,测量下限为10-2Pa,测量不确定度预计小于5%,能适应较宽的工作温度范围,可以满足深空探测需求。

Commercial capacitance diaphragm vacuum gauge cannot be satisfied of the requirement for vacuum measurement in deep space exploration; the miniature capacitance diaphragm gauge has been designed. To prevent the heat deflection of the gauge brought by the temperature variation in measurement process, the inverted T-shaped electrode plate and the con- struction for preventing the heat deflection have been used. To eliminate the stray capacitance and the deflection of measure- ment signal brought by temperature variation in the measurement process the dual electrode construction has been used. The size of miniature capacitance diaphragm vacuum gauge is Ф42 mm×24 ram. Its weight is less than 200 g. The measurement of the minimum is 10-2 Pa. The combined standard uncertainty is less than 5%. The miniature capacitance diaphragm gauge has the wide operating temperature range and can satisfy of the requirement of deep space exploration.